该设备用于晶圆背面减薄工艺。
Model GDM300 grinder is a fully automatic continuous downfeed grinding machine with dual polishing stations for increased are handled through the machine by a 6-axis robot,and load/unload arms designed for 25 um optional edge trimming system is recommended for eliminating edge chipping for thin speed,grinding wheel,and grind spindle downfeed rate speeds can be used to manipulate grinder throughput,surface finish,and wheel life.A two-point inprocess gauge measuring system controls wafer thickness under grind spindles 1 and 2 with an optional laser detection for a more precision thickness accuracy(recommended for<50 um)。Programmable oscillating polish heads can be programmed to maintain wafer profile(ttv)in conjunction with with the optional motorized spindle angle completion at grind and polish,wafer is automatically transferred by robot to the mounter unit for UV exposure,detape,and -cut DAF feature is optional while single DAF is -stack feature may be local polishing unit removes subsurface damage for increased wafer die strength and the ability to handle final thickness of 25 microns.